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  • Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.
  • Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given. (en)
  • Plazmové reaktory v režimu elektronové cyklotronové rezonance (ECR) jsou v poslední době stále vice používány pro nové aplikace v oblasti nanotechnologií. V článku je popsáno generování plazmatu v režimu ECR a jsou diskutovány nejdůležitější mechanismy,které se zde uplatňují. Je uvedena konstrukce jednoduchého plazmového a iontového zdroje v režimu ECR a jsou popsány jeho vlastnosti a naměřené parametry. (cs)
Title
  • Konstrukce a využití plazmového a iontového zdroje v režimu elektronové cyklotronové rezonance (cs)
  • Electron Cyclotron Resonance Plasma and Ion Sources Design and Use
  • Electron Cyclotron Resonance Plasma and Ion Sources Design and Use (en)
skos:prefLabel
  • Konstrukce a využití plazmového a iontového zdroje v režimu elektronové cyklotronové rezonance (cs)
  • Electron Cyclotron Resonance Plasma and Ion Sources Design and Use
  • Electron Cyclotron Resonance Plasma and Ion Sources Design and Use (en)
skos:notation
  • RIV/00216305:26220/04:PU46068!RIV/2005/MSM/262205/N
http://linked.open.../vavai/riv/strany
  • 251-254
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 562548
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/04:PU46068
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http://linked.open.../riv/klicovaSlova
  • Electron Cyclotrone Resonance, plasma reactor, plasma density, electron energy, chemical vapor deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [95B988C23157]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Electronic Devices and Systems 2004. Proceedings.
http://linked.open...in/vavai/riv/obor
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http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Boušek, Jaroslav
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ing. Zdeněk Novotný CSc.
https://schema.org/isbn
  • 80-214-2701-9
http://localhost/t...ganizacniJednotka
  • 26220
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