About: New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM     Goto   Sponge   NotDistinct   Permalink

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Description
  • Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the ddetection system efficiency.
  • Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the ddetection system efficiency. (en)
  • Detekce zpětněodražených elektronů (BSE)v SEM je exaktní metoda pro studium povrchů a složení materiálů. BSE mají vlastnosti, které jsou odlišné od těch jež mají běžně používané sekundární elektrony (SE). Teoretický limit rozlišení (0,6-0,8 nm pro SE a 0,9 nm pro BSE) nejenom na vlastnostech elektronového zdroje, elektronové optiky, technice přípravy vzorku, typu elektronů, ale také na účinnosti detekčního systému. (cs)
Title
  • New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM
  • YAG II scintilátor pro zobrazování s vysokým rozlišením v SEM (cs)
  • New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM (en)
skos:prefLabel
  • New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM
  • YAG II scintilátor pro zobrazování s vysokým rozlišením v SEM (cs)
  • New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM (en)
skos:notation
  • RIV/00216305:26220/04:PU44586!RIV/2005/AV0/262205/N
http://linked.open.../vavai/riv/strany
  • 11-12
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  • P(IBS2065107)
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  • 576205
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  • RIV/00216305:26220/04:PU44586
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  • scanning electron microscopy, YAG scintillator, backscattered electrons (en)
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  • [C79CD3FCFF68]
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  • Skalský Dvůr
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  • Brno
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  • Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
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  • Autrata, Rudolf
  • Schauer, Petr
  • Wandrol, Petr
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number of pages
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  • Ústav přístrojové techniky AV ČR
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  • 80-239-3246-2
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  • 26220
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