About: Screen-printed nano-grain WO3 films for micro hotplate gas sensors

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	By means of an adapted screen-printing technique, sensitive layers of nanopowder tungsten trioxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5 um and particle size was around 50 nm. Each chip contains four thin silicon nitride membranes, in the center of which a polysilicon heating resistor, insulating layers, platinum electrodes and sensitive layer are stacked. Unlike in previously reported works, the technological procedure reported here allows for depositing the sensing layers before the membranes have been etched. This avoids damaging the membranes during film deposition, which leads to gas sensor microsystems with an excellent fabrication yield [1]. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapor deposition or sputtering methods, and keeps power consumption low (80 mW for a working temperature of 480oC). As an example, the sensor response to ammonia, NO2, ethanol, By means of an adapted screen-printing technique, sensitive layers of nanopowder tungsten trioxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5 um and particle size was around 50 nm. Each chip contains four thin silicon nitride membranes, in the center of which a polysilicon heating resistor, insulating layers, platinum electrodes and sensitive layer are stacked. Unlike in previously reported works, the technological procedure reported here allows for depositing the sensing layers before the membranes have been etched. This avoids damaging the membranes during film deposition, which leads to gas sensor microsystems with an excellent fabrication yield [1]. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapor deposition or sputtering methods, and keeps power consumption low (80 mW for a working temperature of 480oC). As an example, the sensor response to ammonia, NO2, ethanol, (en)
Title	Screen-printed nano-grain WO3 films for micro hotplate gas sensors Screen-printed nano-grain WO3 films for micro hotplate gas sensors (en)
skos:prefLabel	Screen-printed nano-grain WO3 films for micro hotplate gas sensors Screen-printed nano-grain WO3 films for micro hotplate gas sensors (en)
skos:notation	RIV/00216305:26220/03:PU40387!RIV/2004/MSM/262204/N
http://linked.open.../vavai/riv/strany	358-363
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Malysz, Karel Hubálek, Jaromír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	626450
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/03:PU40387
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	micromachined gas sensor, screen-printing, nanopowder,tungsten trioxide. (en)
http://linked.open.../riv/klicoveSlovo	nanopowder screen-printing micromachined gas sensor tungsten trioxide.
http://linked.open...ontrolniKodProRIV	[04BBA1C49DCE]
http://linked.open...v/mistoKonaniAkce	Toronto
http://linked.open...i/riv/mistoVydani	Toronto
http://linked.open...i/riv/nazevZdroje	IEEE Sensors 2003,Second IEEE International Conference on Sensors
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	10 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Hubálek, Jaromír Malysz, Karel
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-10-22 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20262200022
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	The Printing House, Stoughton, USA
https://schema.org/isbn	0-7803-8134-3
http://localhost/t...ganizacniJednotka	26220

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