About: Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds     Goto   Sponge   NotDistinct   Permalink

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Description
  • The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.
  • The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX. (en)
  • The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX. (cs)
Title
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds (en)
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds (cs)
skos:prefLabel
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds (en)
  • Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds (cs)
skos:notation
  • RIV/00216305:26220/03:PU38835!RIV06-MSM-26220___
http://linked.open.../vavai/riv/strany
  • 291-291
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 615409
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/03:PU38835
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [AA27F30500AC]
http://linked.open...v/mistoKonaniAkce
  • Povoa de Varzim
http://linked.open...i/riv/mistoVydani
  • Povoa de Varzim, Portugalsko
http://linked.open...i/riv/nazevZdroje
  • Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hubálek, Jaromír
  • Malysz, Karel
  • Ivanov, Peter
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Neuveden
https://schema.org/isbn
  • 0-9733840-0-X
http://localhost/t...ganizacniJednotka
  • 26220
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