About: Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. (en) We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. (cs)
Title	Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (en) Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (cs)
skos:prefLabel	Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (en) Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (cs)
skos:notation	RIV/00216305:26220/03:PU38706!RIV06-GA0-26220___
http://linked.open.../vavai/riv/strany	145-145
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/00/0939), Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Malysz, Karel Hubálek, Jaromír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	626449
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/03:PU38706
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	gas sensors, micro-hotplate, thick-film, thin-film (en)
http://linked.open.../riv/klicoveSlovo	thick-film gas sensors micro-hotplate thin-film
http://linked.open...ontrolniKodProRIV	[CF3EAEA15239]
http://linked.open...v/mistoKonaniAkce	Barcelona
http://linked.open...i/riv/mistoVydani	Calella de la Costa, Barcelona, Spain
http://linked.open...i/riv/nazevZdroje	4th Conference on Electronic Devices
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Integrated intelligent microsensors and microsystems
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Hubálek, Jaromír Llobet, Eduard Correig, Xavier Vilanova, Xavier Gracia, I. Malysz, Karel Ivanov, Peter Brezmes, Jesús Cané, Carlas
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-02-12 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20262200022
number of pages	1 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Instituto de Microelectrónika de Barcelona CNM-CSIC
https://schema.org/isbn	84-607-6771-X
http://localhost/t...ganizacniJednotka	26220

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 77 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software