About: Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures     Goto   Sponge   NotDistinct   Permalink

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Description
  • Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.
  • Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied. (en)
Title
  • Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
  • Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures (en)
skos:prefLabel
  • Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
  • Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures (en)
skos:notation
  • RIV/00216305:26220/03:PU38696!RIV/2004/MSM/262204/N
http://linked.open.../vavai/riv/strany
  • 354-357
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 628351
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/03:PU38696
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [B9E85207B996]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • 10th Electronic devices and Systems Conference 2003
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hubálek, Jaromír
  • Malysz, Karel
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ing. Zdeněk Novotný CSc.
https://schema.org/isbn
  • 80-214-2452-4
http://localhost/t...ganizacniJednotka
  • 26220
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