The contribution deals with the response surface methodology which approximates the relationship between response and independent factors by using polynomial functions and presents the example of microelectronic structure stability evaluation.
The contribution deals with the response surface methodology which approximates the relationship between response and independent factors by using polynomial functions and presents the example of microelectronic structure stability evaluation. (en)
The contribution deals with the response surface methodology which approximates the relationship between response and independent factors by using polynomial functions and presents the example of microelectronic structure stability evaluation. (cs)