About: Low energy focused ion beam milling of silicon and germanium nanostructures

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper focused ion beam milling of very shallow nanostructures in silicon and germanium by low energy Ga+ ions is studied with respect to ion beam and scanning parameters. It has been found that, using low energy ions, many scanning artefacts can be avoided and, additionally, some physical effects (e.g. redeposition and ion channelling) are significantly suppressed. The structures milled with low energy ions suffer less subsurface ion beam damage (amorphization, formation of voids) and are thus more suitable for selected applications in nanotechnology. In this paper focused ion beam milling of very shallow nanostructures in silicon and germanium by low energy Ga+ ions is studied with respect to ion beam and scanning parameters. It has been found that, using low energy ions, many scanning artefacts can be avoided and, additionally, some physical effects (e.g. redeposition and ion channelling) are significantly suppressed. The structures milled with low energy ions suffer less subsurface ion beam damage (amorphization, formation of voids) and are thus more suitable for selected applications in nanotechnology. (en)
Title	Low energy focused ion beam milling of silicon and germanium nanostructures Low energy focused ion beam milling of silicon and germanium nanostructures (en)
skos:prefLabel	Low energy focused ion beam milling of silicon and germanium nanostructures Low energy focused ion beam milling of silicon and germanium nanostructures (en)
skos:notation	RIV/00216305:26210/11:PU91123!RIV11-GA0-26210___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2E08017), P(GEFON/06/E001), P(KAN400100701), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	10
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Kolíbal, Miroslav Šikola, Tomáš Matlocha, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	210005
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/11:PU91123
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	FIB milling, Si, Ge (en)
http://linked.open.../riv/klicoveSlovo	FIB milling Ge Si
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[D0B64EE22D22]
http://linked.open...i/riv/nazevZdroje	NANOTECHNOLOGY
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Spin-dependent transport and electronic correlations in nanostructures Procedures and Methods to Increase Number of Researchers Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	22
http://linked.open...iv/tvurceVysledku	Kolíbal, Miroslav Šikola, Tomáš Matlocha, Tomáš Vystavěl, Tomáš
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0957-4484
number of pages	8 (xsd:int)
http://localhost/t...ganizacniJednotka	26210

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