About: Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Angle-resolved XPS depth profiling is a useful method in surface and ultrathin film research. However, it is useful to test various modeled structures in order to get information on its ability to recognize individual sublayers and to find its resolution limits. In this paper, a model consisting of ultrathin films with sharp interfaces has been proposed and the relative intensities of XPS lines as a function of the detection angle calculated. In addition, this method has been improved by the incorporation of an attenuation of the photoelectron signal already in the layer of its origin. Using the signal obtained from the simulation of electron spectra for surface-analysis-based simulations as an experimental one, genetic algorithms have been used for reproducing the profiles, especially for finding its first estimates. In this way, it was possible to find the pros and cons of the angle-resolved XPS method in the depth profiling of Co, C and SiO2 ultrathin layers on Si substrates. Angle-resolved XPS depth profiling is a useful method in surface and ultrathin film research. However, it is useful to test various modeled structures in order to get information on its ability to recognize individual sublayers and to find its resolution limits. In this paper, a model consisting of ultrathin films with sharp interfaces has been proposed and the relative intensities of XPS lines as a function of the detection angle calculated. In addition, this method has been improved by the incorporation of an attenuation of the photoelectron signal already in the layer of its origin. Using the signal obtained from the simulation of electron spectra for surface-analysis-based simulations as an experimental one, genetic algorithms have been used for reproducing the profiles, especially for finding its first estimates. In this way, it was possible to find the pros and cons of the angle-resolved XPS method in the depth profiling of Co, C and SiO2 ultrathin layers on Si substrates. (en)
Title	Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method (en)
skos:prefLabel	Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method (en)
skos:notation	RIV/00216305:26210/10:PU87228!RIV11-GA0-26210___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2E08017), P(GEFON/06/E001), P(KAN400100701), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	5-6
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Polčák, Josef Šikola, Tomáš Urbánek, Michal Čechal, Jan Bábor, Petr Průša, Stanislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	246942
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/10:PU87228
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	angle-resolved X-ray photoelectron spectroscopy, concentration depth profile, genetic algorithms, thin films (en)
http://linked.open.../riv/klicoveSlovo	angle-resolved X-ray photoelectron spectroscopy concentration depth profile genetic algorithms thin films
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[22826F313C26]
http://linked.open...i/riv/nazevZdroje	Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Spin-dependent transport and electronic correlations in nanostructures Procedures and Methods to Increase Number of Researchers Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	42
http://linked.open...iv/tvurceVysledku	Šikola, Tomáš Bábor, Petr Průša, Stanislav Urbánek, Michal Čechal, Jan Polčák, Josef
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0142-2421
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26210

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