About: Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process

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About: Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Focused ion beam (FIB) milling has been used to fabricate magnetic nanostructures (wires, squares, discs) from single magnetic layers (Co, permalloy) and spin-valve (permalloy/Cu/Co) multilayers (thicknesses 5 - 50 nm) prepared by ion beam sputtering deposition. Milled surfaces of metallic thin films typically exhibit residual roughness, which is also transferred onto the edges of the milled patterns. This can lead to domain wall pinning and influence the magnetization behaviour of the nanostructures. We have investigated the milling process and the influence of the FIB parameters (incidence angle, dwell time, overlap and ion beam current) on the roughness of the milled surface. It has been found that the main reasons for increased roughness are different sputter yields for various crystallographic orientations of the grains in polycrystalline magnetic thin films. We have found that the oblique ion beam angle, long dwell time and overlap <1 are favourable parameters for suppression of this intrinsic r Focused ion beam (FIB) milling has been used to fabricate magnetic nanostructures (wires, squares, discs) from single magnetic layers (Co, permalloy) and spin-valve (permalloy/Cu/Co) multilayers (thicknesses 5 - 50 nm) prepared by ion beam sputtering deposition. Milled surfaces of metallic thin films typically exhibit residual roughness, which is also transferred onto the edges of the milled patterns. This can lead to domain wall pinning and influence the magnetization behaviour of the nanostructures. We have investigated the milling process and the influence of the FIB parameters (incidence angle, dwell time, overlap and ion beam current) on the roughness of the milled surface. It has been found that the main reasons for increased roughness are different sputter yields for various crystallographic orientations of the grains in polycrystalline magnetic thin films. We have found that the oblique ion beam angle, long dwell time and overlap <1 are favourable parameters for suppression of this intrinsic r (en)
Title	Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process (en)
skos:prefLabel	Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process (en)
skos:notation	RIV/00216305:26210/10:PU85927!RIV10-MSM-26210___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2E08017), P(GEFON/06/E001), P(GP202/07/P486), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	14
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šikola, Tomáš Spousta, Jiří Uhlíř, Vojtěch Urbánek, Michal Bábor, Petr Hrnčíř, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	259471
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/10:PU85927
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Focused ion beam (FIB), Spintronics, Cobalt, Sputtering (en)
http://linked.open.../riv/klicoveSlovo	Spintronics Cobalt Sputtering Focused ion beam (FIB)
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[95630A26EB22]
http://linked.open...i/riv/nazevZdroje	NANOTECHNOLOGY
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Spin-dependent transport and electronic correlations in nanostructures Depth profiling of 2D nanostructures by SIMS, TOF-LEIS and XPS combined with ion beam sputtering Procedures and Methods to Increase Number of Researchers Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	21
http://linked.open...iv/tvurceVysledku	Spousta, Jiří Uhlíř, Vojtěch Šikola, Tomáš Bábor, Petr Urbánek, Michal Hrnčíř, Tomáš Kolíbalová, Eva
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0957-4484
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	26210

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