About: A study of the formation and oxidation of PtSi by SR-PES

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About: A study of the formation and oxidation of PtSi by SR-PES Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Studium tvorby a oxidace PtSi (cs) In the paper we present the results on the formation of platinum silicide (PtSi) by means of synchrotron radiation photoelectron spectroscopy (SR-PES) and show the effect of a Pt/Si sample exposure to both a low and high-pressure oxygen atmosphere at the end of an annealing process. We have carried out a detailed analysis of high resolution photoelectron spectra of the Pt 4f and Si 2p peaks which were taken during the sample annealing at specific temperatures. In addition to the generally known Pt2Si and PtSi phases we have recognized an additional intermediate phase during the formation of Pt2Si and attributed it to the Pt3Si phase. We have proved that silicon diffuses towards the sample surface. The results of a low-pressure oxygen experiment have shown that oxygen binds only to surface silicon, however, in the case of a PtSi sample prepared externally in the ON Semiconductor labs under nitrogen/oxygen atmosphere oxygen binds not only to surface silicon but also takes over Si atoms out of the PtSi p In the paper we present the results on the formation of platinum silicide (PtSi) by means of synchrotron radiation photoelectron spectroscopy (SR-PES) and show the effect of a Pt/Si sample exposure to both a low and high-pressure oxygen atmosphere at the end of an annealing process. We have carried out a detailed analysis of high resolution photoelectron spectra of the Pt 4f and Si 2p peaks which were taken during the sample annealing at specific temperatures. In addition to the generally known Pt2Si and PtSi phases we have recognized an additional intermediate phase during the formation of Pt2Si and attributed it to the Pt3Si phase. We have proved that silicon diffuses towards the sample surface. The results of a low-pressure oxygen experiment have shown that oxygen binds only to surface silicon, however, in the case of a PtSi sample prepared externally in the ON Semiconductor labs under nitrogen/oxygen atmosphere oxygen binds not only to surface silicon but also takes over Si atoms out of the PtSi p (en)
Title	A study of the formation and oxidation of PtSi by SR-PES A study of the formation and oxidation of PtSi by SR-PES (en) Studium tvorby a oxidace PtSi (cs)
skos:prefLabel	A study of the formation and oxidation of PtSi by SR-PES A study of the formation and oxidation of PtSi by SR-PES (en) Studium tvorby a oxidace PtSi (cs)
skos:notation	RIV/00216305:26210/06:PU62936!RIV07-MSM-26210___
http://linked.open.../vavai/riv/strany	4717-4722
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	20
http://linked.open...vai/riv/dodaniDat	2007
http://linked.open...aciTvurceVysledku	Šikola, Tomáš Čechal, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	463857
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/06:PU62936
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Platinum silicide, PtSi, Oxidation, Synchrotron radiation photoelectron spectroscopy (SR-PES), X-ray photoelectron spectroscopy (XPS) (en)
http://linked.open.../riv/klicoveSlovo	PtSi Oxidation Platinum silicide X-ray photoelectron spectroscopy (XPS) Synchrotron radiation photoelectron spectroscopy (SR-PES)
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[F611DECE99B1]
http://linked.open...i/riv/nazevZdroje	Surface Science
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	600
http://linked.open...iv/tvurceVysledku	Šikola, Tomáš Čechal, Jan
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0039-6028
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	26210

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