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Description
  • For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.
  • For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found. (en)
  • Při aplikaci této metody je použita speciální experimetální sestava se CCD kamerou jako detektorem. Jsou získány spektrální závislosti lokálních odrazivostí. Zpracováním těchto experientálních dat jsou nalezena rozdělení hodnot lokální tloušťky a lokálního indexu lomu na velké ploše neuniformních vrstev na podložce. (cs)
Title
  • Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
  • Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (en)
  • Charakterizace tenkých vrstev neuniformních v optických parametrech pomocí spektroskopické digitální reflektometrie (cs)
skos:prefLabel
  • Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
  • Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (en)
  • Charakterizace tenkých vrstev neuniformních v optických parametrech pomocí spektroskopické digitální reflektometrie (cs)
skos:notation
  • RIV/00216305:26210/03:PU40933!RIV06-GA0-26210___
http://linked.open.../vavai/riv/strany
  • 260-271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA101/01/1104), P(GA202/01/1110)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 600963
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26210/03:PU40933
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Films nonuniform in optical parameters, optical characterization (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [62CE3A3EEA7E]
http://linked.open...v/mistoKonaniAkce
  • San Diego, California USA
http://linked.open...i/riv/mistoVydani
  • Bellingham, Washington, USA
http://linked.open...i/riv/nazevZdroje
  • Proceedings of SPIE
http://linked.open...in/vavai/riv/obor
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Klapetek, Petr
  • Ohlídal, Ivan
  • Ohlídal, Miloslav
  • Čudek, Vladimír
  • Jákl, Miloš
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • SPIE-The International Society for Optical Engineering
https://schema.org/isbn
  • 0-8194-5055-3
http://localhost/t...ganizacniJednotka
  • 26210
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