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| Description
| - Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 - 10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenide glasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical properties tuned at any particular wavelength. Further refinement of the patterns down to nanometre scale is expected to be useful in other applications; examples include 2D-photonic crystals or devices based on a photonic crystal architecture, e.g. sensors operating in the visible and infrared spectral range and elements based on an optical non-linearity, surface-enhanced effects or evanescent light generation. The authors thank to grant project CZ.1.07/2.3.00/09.0104 %22TEAM CMS%22 realized by European Social Fund and Ministry of Education, Youth and Sports of The Czech Republic within The Education for Competitiveness Operational Programme for financial support.
- Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 - 10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenide glasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical properties tuned at any particular wavelength. Further refinement of the patterns down to nanometre scale is expected to be useful in other applications; examples include 2D-photonic crystals or devices based on a photonic crystal architecture, e.g. sensors operating in the visible and infrared spectral range and elements based on an optical non-linearity, surface-enhanced effects or evanescent light generation. The authors thank to grant project CZ.1.07/2.3.00/09.0104 %22TEAM CMS%22 realized by European Social Fund and Ministry of Education, Youth and Sports of The Czech Republic within The Education for Competitiveness Operational Programme for financial support. (en)
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| Title
| - Soft Imprint Lithography of a Bulk Chalcogenide Glass
- Soft Imprint Lithography of a Bulk Chalcogenide Glass (en)
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| skos:prefLabel
| - Soft Imprint Lithography of a Bulk Chalcogenide Glass
- Soft Imprint Lithography of a Bulk Chalcogenide Glass (en)
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| skos:notation
| - RIV/00216275:25310/12:39896002!RIV13-MSM-25310___
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
| - P(EE2.3.09.0104), P(EE2.3.20.0254)
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/00216275:25310/12:39896002
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - chalcogenide glass; Soft imprint lithography (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
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| http://localhost/t...ganizacniJednotka
| |
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