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rdf:type
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Description
| - The advantages and applications of chalcogenide glass ChG thin film photoresists for grayscale lithography are demonstrated. It is shown that the ChG films can be used to make ultrathin 600 nm, high-resolution grayscale patterns, which can find their application, for example, in IR optics.
- The advantages and applications of chalcogenide glass ChG thin film photoresists for grayscale lithography are demonstrated. It is shown that the ChG films can be used to make ultrathin 600 nm, high-resolution grayscale patterns, which can find their application, for example, in IR optics. (en)
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Title
| - Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning
- Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning (en)
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skos:prefLabel
| - Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning
- Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning (en)
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skos:notation
| - RIV/00216275:25310/09:00009579!RIV10-MSM-25310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216275:25310/09:00009579
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - chalcogenide glass; electron lithography; optical lithography; photoresist (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Journal of Micro/Nanolithography, MEMS, and MOEMS
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Vlček, Miroslav
- Jain, H.
- Kovalskiy, A.
- Dubey, M.
- Cech, J.
- Heffner, W. R.
- Waits, C. M.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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