About: Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The advantages and applications of chalcogenide glass ChG thin film photoresists for grayscale lithography are demonstrated. It is shown that the ChG films can be used to make ultrathin 600 nm, high-resolution grayscale patterns, which can find their application, for example, in IR optics.
  • The advantages and applications of chalcogenide glass ChG thin film photoresists for grayscale lithography are demonstrated. It is shown that the ChG films can be used to make ultrathin 600 nm, high-resolution grayscale patterns, which can find their application, for example, in IR optics. (en)
Title
  • Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning
  • Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning (en)
skos:prefLabel
  • Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning
  • Chalcogenide glass e-beam and photo-resists for ultrathin gray scale patterning (en)
skos:notation
  • RIV/00216275:25310/09:00009579!RIV10-MSM-25310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021627501)
http://linked.open...iv/cisloPeriodika
  • 4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 306605
http://linked.open...ai/riv/idVysledku
  • RIV/00216275:25310/09:00009579
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • chalcogenide glass; electron lithography; optical lithography; photoresist (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [459A4A8CEC67]
http://linked.open...i/riv/nazevZdroje
  • Journal of Micro/Nanolithography, MEMS, and MOEMS
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 8
http://linked.open...iv/tvurceVysledku
  • Vlček, Miroslav
  • Jain, H.
  • Kovalskiy, A.
  • Dubey, M.
  • Cech, J.
  • Heffner, W. R.
  • Waits, C. M.
http://linked.open...n/vavai/riv/zamer
issn
  • 1932-5150
number of pages
http://localhost/t...ganizacniJednotka
  • 25310
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software