About: Preparation of Nb2O5 thin Films by d.c. Reactive Magnetron Sputtering     Goto   Sponge   NotDistinct   Permalink

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Description
  • Thin films of niobium oxide were deposited on silicon wafer, titanium and glass by the process of physical vapour deposition. Pure niobium solid target was used as a sputter source. Argon-oxygen admixture was introduced into the discharge chamber.
  • Thin films of niobium oxide were deposited on silicon wafer, titanium and glass by the process of physical vapour deposition. Pure niobium solid target was used as a sputter source. Argon-oxygen admixture was introduced into the discharge chamber. (en)
  • Tenké filmy oxidu niobičného byly deponovány na silikonove, titanové a sklenéné substráty procesem PVD. Terče z čistého niobu byly zdroj k odpaření. Směs argon kyslík byla použita jako reaktivní atmosféra v naprašovací komoře. (cs)
Title
  • Preparation of Nb2O5 thin Films by d.c. Reactive Magnetron Sputtering
  • Preparation of Nb2O5 thin Films by d.c. Reactive Magnetron Sputtering (en)
  • Příprava tenkých filmů oxidu niobičného pomocí reaktivního naprašování magnetronem (cs)
skos:prefLabel
  • Preparation of Nb2O5 thin Films by d.c. Reactive Magnetron Sputtering
  • Preparation of Nb2O5 thin Films by d.c. Reactive Magnetron Sputtering (en)
  • Příprava tenkých filmů oxidu niobičného pomocí reaktivního naprašování magnetronem (cs)
skos:notation
  • RIV/00216275:25310/06:00004488!RIV08-MSM-25310___
http://linked.open.../vavai/riv/strany
  • 500-507
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021627501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 494254
http://linked.open...ai/riv/idVysledku
  • RIV/00216275:25310/06:00004488
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • FTIR; films; conductivity; Raman spectroscopy; niobium oxide (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [638F348D2339]
http://linked.open...i/riv/mistoVydani
  • Pardubice
http://linked.open...i/riv/nazevZdroje
  • Conference Papers CCT 2006
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kalenda, Petr
  • Cameron, David
  • Skoupil, Pavel
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Univerzita Pardubice
https://schema.org/isbn
  • 80-7194-856-X
http://localhost/t...ganizacniJednotka
  • 25310
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