About: Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://iopscience.iop.org/0957-0233/25/11/115201/pdf/0957-0233_25_11_115201.pdf
Description	The construction of a normal-incidence imaging spectrophotometer for mapping of thin film properties is described. It is based on an on-axis reflective imaging system, utilising a telescope-like arrangement. A charge-coupled device camera is used as the detector, permitting measurements in the spectral range of 275-1100 nm with resolution of 37 mu m. The performance of the instrument is demonstrated by optical characterisation of highly non-uniform thin films deposited from hexamethyldisiloxane on silicon substrates by a single capillary plasma jet at atmospheric pressure. The imaging spectrophotometry is used as a self-sufficient technique for the determination of both the film optical constants and maps of local thickness. The thickness maps are compared with the results of conventional thickness profile characterisation methods, profilometry and atomic force microscopy and the differences and errors are discussed. The construction of a normal-incidence imaging spectrophotometer for mapping of thin film properties is described. It is based on an on-axis reflective imaging system, utilising a telescope-like arrangement. A charge-coupled device camera is used as the detector, permitting measurements in the spectral range of 275-1100 nm with resolution of 37 mu m. The performance of the instrument is demonstrated by optical characterisation of highly non-uniform thin films deposited from hexamethyldisiloxane on silicon substrates by a single capillary plasma jet at atmospheric pressure. The imaging spectrophotometry is used as a self-sufficient technique for the determination of both the film optical constants and maps of local thickness. The thickness maps are compared with the results of conventional thickness profile characterisation methods, profilometry and atomic force microscopy and the differences and errors are discussed. (en)
Title	Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry (en)
skos:prefLabel	Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry (en)
skos:notation	RIV/00216224:14740/14:00073317!RIV15-MSM-14740___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED1.1.00/02.0068), P(ED2.1.00/03.0086), P(EE2.3.20.0027), P(TA02010784)
http://linked.open...iv/cisloPeriodika	11
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Zajíčková, Lenka Nečas, David Čudek, Vladimír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Středoevropský technologický institut
http://linked.open...dnocenehoVysledku	27369
http://linked.open...ai/riv/idVysledku	RIV/00216224:14740/14:00073317
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	imaging spectrophotometry; micro-plasma jet; non-uniform thin films; optical properties; thickness mapping (en)
http://linked.open.../riv/klicoveSlovo	optical properties non-uniform thin films imaging spectrophotometry micro-plasma jet thickness mapping
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[191F0D0A89D2]
http://linked.open...i/riv/nazevZdroje	MEASUREMENT SCIENCE & TECHNOLOGY
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Support of Excellence Research Teams in the Field of Nanotechnologies and Microtechnologies Central european institute of technology Regional R&D center for low-cost plasma and nanotechnology surface modifications Optimization of thin film systems used in the optics industry
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	25
http://linked.open...iv/tvurceVysledku	Benedikt, Jan Klapetek, Petr Nečas, David Zajíčková, Lenka Čudek, Vladimír Ohlidal, Miloslav Rugner, Katja Vodak, Jiří
http://linked.open...ain/vavai/riv/wos	000343940800020
issn	0957-0233
number of pages	9 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/0957-0233/25/11/115201
http://localhost/t...ganizacniJednotka	14740

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software