About: Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy     Goto   Sponge   NotDistinct   Permalink

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Description
  • Strukturní charakterizace leptaných amorfních W/Si vrstevnatých mřížek s laterální periodicitou 800 nm rtg reflektivitou. Drsnost rozhraní byla vzata do úvahy přístupem utlumení koherentní amplitudy u zobecněných Fresnelových koeficientů. (cs)
  • Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study.
  • Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study. (en)
Title
  • Strukturní charakterizace planárních W/Si vrstevnatých mřížek rtg reflektivitou a skenovací elektronovou mikroskopií (cs)
  • Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy
  • Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy (en)
skos:prefLabel
  • Strukturní charakterizace planárních W/Si vrstevnatých mřížek rtg reflektivitou a skenovací elektronovou mikroskopií (cs)
  • Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy
  • Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy (en)
skos:notation
  • RIV/00216224:14310/99:00000993!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany
  • A220
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 143100002)
http://linked.open...iv/cisloPeriodika
  • 9999
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 755198
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/99:00000993
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • gratings; multilayers; x-ray reflectivity (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [B5E31A5AA166]
http://linked.open...i/riv/nazevZdroje
  • J. Phys. D: Appl. Phys.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 32
http://linked.open...iv/tvurceVysledku
  • Mikulík, Petr
  • Jergel, M.
  • Kostič, I.
  • Brunel, M.
  • Majková, E.
  • Senderák, R.
  • Konečníková, A.
  • Luby, Š.
  • Pinčík, E.
http://linked.open...n/vavai/riv/zamer
issn
  • 0022-3727
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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