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  • High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented.
  • High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented. (en)
Title
  • Evolution of discharge current in high power impulse magnetron sputtering
  • Evolution of discharge current in high power impulse magnetron sputtering (en)
skos:prefLabel
  • Evolution of discharge current in high power impulse magnetron sputtering
  • Evolution of discharge current in high power impulse magnetron sputtering (en)
skos:notation
  • RIV/00216224:14310/13:00066351!RIV14-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 73794
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/13:00066351
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • HiPIMS; discharge current; magnetron sputtering; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [F5CF66DF603B]
http://linked.open...v/mistoKonaniAkce
  • Liberec
http://linked.open...i/riv/mistoVydani
  • Liberec
http://linked.open...i/riv/nazevZdroje
  • PAPN 2013: Book of extended abstracts
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vašina, Petr
  • Klein, Peter
  • Fekete, Matej
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Technická univerzita v Liberci
https://schema.org/isbn
  • 9788073729882
http://localhost/t...ganizacniJednotka
  • 14310
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