About: Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Waveforms of discharges voltage and current and their changes due to changes of plasma parameters were studied recently. Mainly the sensitive reaction of Fourier components of discharge voltage to presence of deposited or etched thin films showed up as an useful diagnostic method of plasma processing. Waveforms of discharges voltage and current and their changes due to changes of plasma parameters were studied recently. Mainly the sensitive reaction of Fourier components of discharge voltage to presence of deposited or etched thin films showed up as an useful diagnostic method of plasma processing. (en)
Title	Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing (en)
skos:prefLabel	Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing (en)
skos:notation	RIV/00216224:14310/12:00061370!RIV13-MSM-14310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0086)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Žemlička, Radek Buršíková, Vilma Dvořák, Pavel
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	138992
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/12:00061370
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	higher harmonics; RF discharge; plasma processing (en)
http://linked.open.../riv/klicoveSlovo	higher harmonics RF discharge plasma processing
http://linked.open...ontrolniKodProRIV	[C16F1FB145FF]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Potential and Application of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstrakts 2012
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Regional R&D center for low-cost plasma and nanotechnology surface modifications
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Dvořák, Pavel Žemlička, Radek
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-01-01 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Masaryk University
https://schema.org/isbn	9788021059795
http://localhost/t...ganizacniJednotka	14310

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