About: PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html
Description	The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained films mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique. The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained films mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique. (en)
Title	PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD (en)
skos:prefLabel	PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD (en)
skos:notation	RIV/00216224:14310/12:00057155!RIV13-AV0-14310___
http://linked.open...avai/riv/aktivita	P S
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0086), P(FT-TA5/114), P(GA202/07/1669), P(KAN311610701), S
http://linked.open...iv/cisloPeriodika	106
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Buršíková, Vilma Stoica, Adrian Kelar, Lukáš Čupera, Jan Mocanu, Valentin
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	162894
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/12:00057155
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	RF-PECVD; amorphous carbon; protective coatings; DLC (en)
http://linked.open.../riv/klicoveSlovo	amorphous carbon protective coatings RF-PECVD DLC
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[61A6F53281CB]
http://linked.open...i/riv/nazevZdroje	Chem. listy
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Development of technology of PECVD films formation for automotive lighting equipment Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Nanometrology using methods of scanning probe microscopy Regional R&D center for low-cost plasma and nanotechnology surface modifications
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	106/2012
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Stoica, Adrian Kelar, Lukáš Mocanu, Valentin Čupera, Jan
issn	0009-2770
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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