About: Mechanical properties of thin films deposited by TVA and G-TVA methods

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon. The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon. (en)
Title	Mechanical properties of thin films deposited by TVA and G-TVA methods Mechanical properties of thin films deposited by TVA and G-TVA methods (en)
skos:prefLabel	Mechanical properties of thin films deposited by TVA and G-TVA methods Mechanical properties of thin films deposited by TVA and G-TVA methods (en)
skos:notation	RIV/00216224:14310/11:00049427!RIV12-AV0-14310___
http://linked.open...avai/riv/aktivita	N P S
http://linked.open...avai/riv/aktivity	N, P(KAN311610701), S
http://linked.open...iv/cisloPeriodika	14
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Stoica, Adrian Vladoiu, Rodica
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	211255
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/11:00049427
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Thermionic Vacuum Arc; Gaseous Thermionic Vacuum Arc; DLC coatings; nanoindentation (en)
http://linked.open.../riv/klicoveSlovo	nanoindentation DLC coatings Gaseous Thermionic Vacuum Arc Thermionic Vacuum Arc
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[33191B85C3F0]
http://linked.open...i/riv/nazevZdroje	Chemicke Listy
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanometrology using methods of scanning probe microscopy
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	105/2011
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Bláhová, Olga Ciupina, Victor Contulov, Mirela Musa, Geavit Stoica, Adrian Vladoiu, Rodica
issn	0009-2770
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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