About: Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this work we study two stage and three stage annealing processes with application of Tabula rasa. The evolution of precipitates at various phases during annealing process for various temperatures was obtained from series of experimental techniques. In this work we study two stage and three stage annealing processes with application of Tabula rasa. The evolution of precipitates at various phases during annealing process for various temperatures was obtained from series of experimental techniques. (en)
Title	Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing (en)
skos:prefLabel	Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing (en)
skos:notation	RIV/00216224:14310/10:00046555!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/09/1013), Z(MSM0021622410)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Caha, Ondřej Buršík, Jiří Meduňa, Mojmír Kuběna, Josef Kuběna, Alan
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	277891
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/10:00046555
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	oxygen precipitžation; si wafers (en)
http://linked.open.../riv/klicoveSlovo	oxygen precipitžation si wafers
http://linked.open...ontrolniKodProRIV	[76796A3BF077]
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Nucleation and growth of oxygen precipitates in silicon
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Svoboda, Milan Caha, Ondřej Kuběna, Alan Kuběna, Josef Meduňa, Mojmír
http://linked.open...n/vavai/riv/zamer	Physical and chemical properties of advanced materials and structures
http://localhost/t...ganizacniJednotka	14310

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