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Description
  • A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in nitrogen capacitively coupled discharge. Strong influence of the sheath around the probe on the probe voltage and correlation between the probe current waveform and the discharge current are shown. At low pressure, the plasma potential waveform contains high amount of higher harmonic frequencies whose amplitudes are comparable with the amplitude of the fundamental frequency.
  • A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in nitrogen capacitively coupled discharge. Strong influence of the sheath around the probe on the probe voltage and correlation between the probe current waveform and the discharge current are shown. At low pressure, the plasma potential waveform contains high amount of higher harmonic frequencies whose amplitudes are comparable with the amplitude of the fundamental frequency. (en)
Title
  • Measurement of plasma potential waveform by an uncompensated probe
  • Measurement of plasma potential waveform by an uncompensated probe (en)
skos:prefLabel
  • Measurement of plasma potential waveform by an uncompensated probe
  • Measurement of plasma potential waveform by an uncompensated probe (en)
skos:notation
  • RIV/00216224:14310/10:00043616!RIV11-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • 2
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 270030
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/10:00043616
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma potential; probe; higher harmonic frequencies; capacitively coupled discharge; plasma (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [285B625EE8B4]
http://linked.open...i/riv/nazevZdroje
  • Plasma Sources Sci. Technol.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 19
http://linked.open...iv/tvurceVysledku
  • Dvořák, Pavel
http://linked.open...ain/vavai/riv/wos
  • 000275921200014
http://linked.open...n/vavai/riv/zamer
issn
  • 0963-0252
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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