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  • The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated.
  • The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated. (en)
Title
  • Plasma treatment of silicon surface
  • Plasma treatment of silicon surface (en)
skos:prefLabel
  • Plasma treatment of silicon surface
  • Plasma treatment of silicon surface (en)
skos:notation
  • RIV/00216224:14310/10:00040567!RIV11-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • O, P(KAN101630651), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 279130
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/10:00040567
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • silicon surface - dielectric barrier discharge - plasma treatment (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [9B6BCA8C5320]
http://linked.open...v/mistoKonaniAkce
  • Plzeň
http://linked.open...i/riv/mistoVydani
  • Plzeň
http://linked.open...i/riv/nazevZdroje
  • Potential and Applications of Thin Ceramic and Metal Coatings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Černák, Mirko
  • Skácelová, Dana
  • Sťahel, Pavel
  • Haničinec, Martin
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Západočeská univerzita v Plzni
https://schema.org/isbn
  • 978-80-7043-894-7
http://localhost/t...ganizacniJednotka
  • 14310
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