About: Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

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About: Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. (en)
Title	Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model (en)
skos:prefLabel	Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model (en)
skos:notation	RIV/00216224:14310/08:00025162!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/06/0776), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Jurmanová, Jana Navrátil, Zdeněk Dvořák, Pavel Trunec, David
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	373213
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/08:00025162
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	rf discharge; collisional-radiative model; optical emission spectroscopy; neon (en)
http://linked.open.../riv/klicoveSlovo	neon optical emission spectroscopy rf discharge collisional-radiative model
http://linked.open...ontrolniKodProRIV	[D8EDD4ACFCE6]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced research and development of low-temperature plasma sources
http://linked.open...UplatneniVysledku	2008
http://linked.open...iv/tvurceVysledku	Dvořák, Pavel Navrátil, Zdeněk Trunec, David Jurmanová, Jana
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2008-06-16 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
number of pages	1 (xsd:int)
http://purl.org/ne...btex#hasPublisher	ČVUT v Praze, Organizační výbor sympozia
https://schema.org/isbn	978-80-01-04030-0
http://localhost/t...ganizacniJednotka	14310

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