About: DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE     Goto   Sponge   NotDistinct   Permalink

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Description
  • The aim of the work was to study the deposition of thin films in ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 atmosphere. The mechanical properties of films were studied by indentation techniques. The films exhibited hardnes in the range from 0.5 to 7 GPa depending on the deposition conditions.
  • The aim of the work was to study the deposition of thin films in ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 atmosphere. The mechanical properties of films were studied by indentation techniques. The films exhibited hardnes in the range from 0.5 to 7 GPa depending on the deposition conditions. (en)
Title
  • DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE
  • DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE (en)
skos:prefLabel
  • DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE
  • DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE (en)
skos:notation
  • RIV/00216224:14310/08:00025102!RIV10-GA0-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/06/1473)
http://linked.open...iv/cisloPeriodika
  • 16
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 362542
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/08:00025102
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [6337413BD1BE]
http://linked.open...i/riv/nazevZdroje
  • Chemické Listy, II Central European Symposium on Plasma Chemistry 2008
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 1
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Studnička, Filip
  • Sťahel, Pavel
  • Trunec, David
  • Kelar, Lukáš
issn
  • 1803-2389
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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