About: Study of Mechanical Properties of NCD Coatings

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Study of Mechanical Properties of NCD Coatings Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film. The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film. (en)
Title	Study of Mechanical Properties of NCD Coatings Study of Mechanical Properties of NCD Coatings (en)
skos:prefLabel	Study of Mechanical Properties of NCD Coatings Study of Mechanical Properties of NCD Coatings (en)
skos:notation	RIV/00216224:14310/07:00020900!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA106/05/0274), P(GA202/05/0607), Z(MSM0021622411), Z(MSM4977751303)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Bláhová, Olga Jašek, Ondřej Klapetek, Petr Zajíčková, Lenka Buršíková, Vilma Buršík, Jiří Franta, Daniel Mervartová, Monika
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	453278
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/07:00020900
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Mechanical Properties; NCD Coatings (en)
http://linked.open.../riv/klicoveSlovo	NCD Coatings Mechanical Properties
http://linked.open...ontrolniKodProRIV	[341D4FCC66CE]
http://linked.open...v/mistoKonaniAkce	Soláň, Rožnov pod Radhoštěm
http://linked.open...i/riv/mistoVydani	Rožnov pod Radhoštěm
http://linked.open...i/riv/nazevZdroje	VI. ročník konferencie Vrstvy a povlaky 2007
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Synthesis of carbon micro- and nanostructures by plasma technologies Multiscale approach to relationships between mechanical and microstructural characteristics of materials
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, Vilma Franta, Daniel Jašek, Ondřej Klapetek, Petr Zajíčková, Lenka Bláhová, Olga Karásková, Monika
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2007-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Predikce poruch heterogenních materiálů, komponent mechanických a biomechanických systémů.
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Liss a.s.
https://schema.org/isbn	978-80-969310-4-0
http://localhost/t...ganizacniJednotka	14310

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 48 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software