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  • In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO.
  • In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO. (en)
Title
  • Influence of methane on capacitively coupled oxygen discharge
  • Influence of methane on capacitively coupled oxygen discharge (en)
skos:prefLabel
  • Influence of methane on capacitively coupled oxygen discharge
  • Influence of methane on capacitively coupled oxygen discharge (en)
skos:notation
  • RIV/00216224:14310/07:00020196!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 426300
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/07:00020196
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • oxygen; methane; capacitively coupled; plasma (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [F6142D3E2F38]
http://linked.open...v/mistoKonaniAkce
  • Slovensko, Podbánské
http://linked.open...i/riv/mistoVydani
  • Bratislava
http://linked.open...i/riv/nazevZdroje
  • 16th Symposium on Application of Plasma Processes - Book of Abstracts
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Dvořák, Pavel
  • Janča, Jan
  • Doležal, Vojtěch
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Union of Slovak Mathematicians and Physicists
https://schema.org/isbn
  • 978-80-89186-13-6
http://localhost/t...ganizacniJednotka
  • 14310
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