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  • Rocking curve imaging is based on measuring a series of Bragg-reflection digital topographs by monochromatic parallel-beam synchrotron radiation in order to quantify local crystal lattice rotations within a large surface area with high angular and high spatial resolution. In this paper we apply the method to map local lattice tilts in two distinct semiconductor sample types with lattice misorientations up to 0.5 deg and with spatial resolution from 30 um down to 1 um. We analyse the measured surface-tilt data volumes for samples with almost smoothly varying specific misoriented defect formation in GaAs wafers and for an inherent subsurface grain structure of epitaxial lateral overgrowth wings in GaN. Back-projected tilt maps and histograms provide both local and global characteristics of the microcrystallinity.
  • Rocking curve imaging is based on measuring a series of Bragg-reflection digital topographs by monochromatic parallel-beam synchrotron radiation in order to quantify local crystal lattice rotations within a large surface area with high angular and high spatial resolution. In this paper we apply the method to map local lattice tilts in two distinct semiconductor sample types with lattice misorientations up to 0.5 deg and with spatial resolution from 30 um down to 1 um. We analyse the measured surface-tilt data volumes for samples with almost smoothly varying specific misoriented defect formation in GaAs wafers and for an inherent subsurface grain structure of epitaxial lateral overgrowth wings in GaN. Back-projected tilt maps and histograms provide both local and global characteristics of the microcrystallinity. (en)
Title
  • Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging
  • Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging (en)
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  • Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging
  • Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging (en)
skos:notation
  • RIV/00216224:14310/06:00017520!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 470056
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/06:00017520
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • X-ray diffraction; X-ray topography; Microdiffraction; Crystal growth; Microstructure; GaAs; GaN (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [1555E13EB509]
http://linked.open...i/riv/nazevZdroje
  • Applied Surface Science
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 253
http://linked.open...iv/tvurceVysledku
  • Baumbach, T.
  • Mikulík, Petr
  • Helfen, L.
  • Pernot, P.
  • Lübbert, D.
http://linked.open...n/vavai/riv/zamer
issn
  • 0169-4332
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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