About: Study of magnetic field influence on charged species in a low pressure helicon reactor

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy. The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7 Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750 nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results. The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy. The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7 Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750 nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results. (en)
Title	Study of magnetic field influence on charged species in a low pressure helicon reactor Study of magnetic field influence on charged species in a low pressure helicon reactor (en)
skos:prefLabel	Study of magnetic field influence on charged species in a low pressure helicon reactor Study of magnetic field influence on charged species in a low pressure helicon reactor (en)
skos:notation	RIV/00216224:14310/06:00015838!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	suppl. B
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Zajíčková, Lenka Šmíd, Radek
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	502279
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/06:00015838
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	helicon reactor; argon; oxygen; electron density; ion flux (en)
http://linked.open.../riv/klicoveSlovo	argon electron density ion flux oxygen helicon reactor
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[0C6315E31EA5]
http://linked.open...i/riv/nazevZdroje	Czechoslovak Journal of Physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced topics in physics and chemistry of plasmas
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	56
http://linked.open...iv/tvurceVysledku	Zajíčková, Lenka Šmíd, Radek Bousquet, Angelique Granier, Agnès Gilles, Cartry
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0011-4626
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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