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  • In this work the mixture of hydrogen and a small amount (0-1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex. The dominating ions in the discharge were H+. Its amount was significantly decreased when a small amount of methane was added. Although we did not observe any neutral particles heavier than the methane, the positive ions with 1-3 carbon atoms were detected. The dominant carbon containing ion was CH5+. Further, the dissociation degree of hydrogen molecules decreased when methane was added into the discharge.
  • In this work the mixture of hydrogen and a small amount (0-1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex. The dominating ions in the discharge were H+. Its amount was significantly decreased when a small amount of methane was added. Although we did not observe any neutral particles heavier than the methane, the positive ions with 1-3 carbon atoms were detected. The dominant carbon containing ion was CH5+. Further, the dissociation degree of hydrogen molecules decreased when methane was added into the discharge. (en)
Title
  • Influence of methane on the capacitively coupled hydrogen discharge
  • Influence of methane on the capacitively coupled hydrogen discharge (en)
skos:prefLabel
  • Influence of methane on the capacitively coupled hydrogen discharge
  • Influence of methane on the capacitively coupled hydrogen discharge (en)
skos:notation
  • RIV/00216224:14310/06:00015763!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • Suppl.B
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 479438
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/06:00015763
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • hydrogen; methane; discharge (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [DB51FA411AA8]
http://linked.open...i/riv/nazevZdroje
  • Czechoslovak journal of physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 56
http://linked.open...iv/tvurceVysledku
  • Dvořák, Pavel
  • Janča, Jan
  • Doležal, Vojtěch
http://linked.open...ain/vavai/riv/wos
  • 000241336500012
http://linked.open...n/vavai/riv/zamer
issn
  • 0011-4626
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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