About: The Role of Secondary Electrons in Low Pressure rf Glow Discharge

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheaths these electrons have relatively high energy and therefore they can ionize neutral atoms. We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheaths these electrons have relatively high energy and therefore they can ionize neutral atoms. (en)
Title	The Role of Secondary Electrons in Low Pressure rf Glow Discharge The Role of Secondary Electrons in Low Pressure rf Glow Discharge (en)
skos:prefLabel	The Role of Secondary Electrons in Low Pressure rf Glow Discharge The Role of Secondary Electrons in Low Pressure rf Glow Discharge (en)
skos:notation	RIV/00216224:14310/05:00024543!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/03/0827), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Brzobohatý, Oto Trunec, David
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	541436
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00024543
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	computer simulation; rf glow discharg; secondary electrons (en)
http://linked.open.../riv/klicoveSlovo	computer simulation secondary electrons rf glow discharg
http://linked.open...ontrolniKodProRIV	[A242D56ED8E0]
http://linked.open...v/mistoKonaniAkce	Prague
http://linked.open...i/riv/mistoVydani	Prague
http://linked.open...i/riv/nazevZdroje	WDS 2005 - Proceedings of Contributed Papers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	A study of elementary processes in low-temperature and technologically oriented plasmas and the development of relevant diagnostic methods
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Brzobohatý, Oto Trunec, David
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2005-06-07 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	MATFYZPRESS
https://schema.org/isbn	80-86732-59-2
http://localhost/t...ganizacniJednotka	14310

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