About: Optical Emission Spectroscopy in HMDSO/O2 RF Glow Discharge     Goto   Sponge   NotDistinct   Permalink

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  • We applied optical emission spectroscopy to study HMDSO/O2 plasmas and detected emission lines and bands related to CO, CO2+, OH, CH, H, H2, O, N2 as an impurity and Ar as an actinometer. We have observed only very low emission of Si and SiO. With increasing rf power the increasing concentration of electrons probably caused increasing intensity of emission. This was confirmed for the concentration of oxygen radicals by actinometry. The changes of HMDSO fraction have much more significant influence on the gas phase composition. The oxygen containing molecules (CO, OH) show the same trend on the HMDSO fraction with a maximum at 0.16. The CH and H species show also similar trends to each other with the maximum at 0.28. It is interesting to notice that this trend was not observed for H2 molecule which intensity increase constantly with the HMDSO fraction. The oxygen atomic line, on the other hand, decreased.
  • We applied optical emission spectroscopy to study HMDSO/O2 plasmas and detected emission lines and bands related to CO, CO2+, OH, CH, H, H2, O, N2 as an impurity and Ar as an actinometer. We have observed only very low emission of Si and SiO. With increasing rf power the increasing concentration of electrons probably caused increasing intensity of emission. This was confirmed for the concentration of oxygen radicals by actinometry. The changes of HMDSO fraction have much more significant influence on the gas phase composition. The oxygen containing molecules (CO, OH) show the same trend on the HMDSO fraction with a maximum at 0.16. The CH and H species show also similar trends to each other with the maximum at 0.28. It is interesting to notice that this trend was not observed for H2 molecule which intensity increase constantly with the HMDSO fraction. The oxygen atomic line, on the other hand, decreased. (en)
Title
  • Optical Emission Spectroscopy in HMDSO/O2 RF Glow Discharge
  • Optical Emission Spectroscopy in HMDSO/O2 RF Glow Discharge (en)
skos:prefLabel
  • Optical Emission Spectroscopy in HMDSO/O2 RF Glow Discharge
  • Optical Emission Spectroscopy in HMDSO/O2 RF Glow Discharge (en)
skos:notation
  • RIV/00216224:14310/05:00014213!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1K05025), Z(MSM 143100003), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
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  • 534697
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00014213
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Optical emission spectroscopy; hexamethyldisiloxane; oxygen; deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E90FF0EBC5E8]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • WDS'05 Proceedings of Contributed Papers, Part II
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Zajíčková, Lenka
  • Šmíd, Radek
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • MATFYZPRESS
https://schema.org/isbn
  • 80-86732-59-2
http://localhost/t...ganizacniJednotka
  • 14310
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