About: Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging     Goto   Sponge   NotDistinct   Permalink

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  • We report on recent advances in spatially resolved x-ray diffraction, extending the technique known as rocking curve imaging down to 1--2 um spatial resolution. Application to a set of gallium nitride samples grown by epitaxial lateral overgrowth (ELO) shows the potential of the technique. Quantitative information on crystallographic misorientations and lattice quality can be obtained by direct imaging with high lateral resolution. Results from two samples of ELO-GaN grown on different substrates are compared. Tilt in individual lateral periods of the ELO structure can be quantified. Local tilt fluctuations are distinguished from macroscopic variations (curvature). The local lattice quality can be investigated via the peak width of diffraction profiles recorded in individual camera pixels. The peak broadening previously observed in laboratory x-ray diffraction measurements is found to have (at least) two different reasons.
  • We report on recent advances in spatially resolved x-ray diffraction, extending the technique known as rocking curve imaging down to 1--2 um spatial resolution. Application to a set of gallium nitride samples grown by epitaxial lateral overgrowth (ELO) shows the potential of the technique. Quantitative information on crystallographic misorientations and lattice quality can be obtained by direct imaging with high lateral resolution. Results from two samples of ELO-GaN grown on different substrates are compared. Tilt in individual lateral periods of the ELO structure can be quantified. Local tilt fluctuations are distinguished from macroscopic variations (curvature). The local lattice quality can be investigated via the peak width of diffraction profiles recorded in individual camera pixels. The peak broadening previously observed in laboratory x-ray diffraction measurements is found to have (at least) two different reasons. (en)
Title
  • Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging
  • Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging (en)
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  • Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging
  • Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging (en)
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  • RIV/00216224:14310/05:00013719!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 143100002), Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 10A
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 528307
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00013719
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • lattice tilt; diffraction; X-ray diffraction; GaN; ELO (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [5281691DCC4E]
http://linked.open...i/riv/nazevZdroje
  • Journal of physics D: Applied physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 38
http://linked.open...iv/tvurceVysledku
  • Baumbach, T.
  • Mikulík, Petr
  • Helfen, L.
  • Pernot, P.
  • Keller, S.
  • DenBaars, S. P.
  • Lübbert, D.
  • Katona, T. M.
  • Köhler, R.
http://linked.open...n/vavai/riv/zamer
issn
  • 0022-3727
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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