About: Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The method called rocking-curve imaging (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve analysis and digital X-ray diffraction topography. In this article, an extension of the method is proposed by which dislocation densities in largescale samples (semiconductor wafer crystals) can be quantified and their variation across the sample surface determined in an instrumentally simple way. Results from a nearly dislocation-free S-doped InP crystal and a semi-insulating GaAs are presented; both display a clearly non-random distribution of dislocations.
  • The method called rocking-curve imaging (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve analysis and digital X-ray diffraction topography. In this article, an extension of the method is proposed by which dislocation densities in largescale samples (semiconductor wafer crystals) can be quantified and their variation across the sample surface determined in an instrumentally simple way. Results from a nearly dislocation-free S-doped InP crystal and a semi-insulating GaAs are presented; both display a clearly non-random distribution of dislocations. (en)
Title
  • Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging
  • Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging (en)
skos:prefLabel
  • Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging
  • Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging (en)
skos:notation
  • RIV/00216224:14310/05:00013607!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 518357
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00013607
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • lattice tilt; diffraction; X-ray diffraction; wafers; defects; InP; GaAs (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [235039685C8B]
http://linked.open...i/riv/nazevZdroje
  • J. Appl. Crystallography
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 38
http://linked.open...iv/tvurceVysledku
  • Baumbach, T.
  • Ferrari, C.
  • Korytár, D.
  • Mikulík, Petr
  • Helfen, L.
  • Pernot, P.
  • Lübbert, D.
  • Verdi, N.
http://linked.open...n/vavai/riv/zamer
issn
  • 0021-8898
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software