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Description
  • Deep lamellar diffraction gratings fabricated by etching a transparent quartz plate are studied using spectroscopic ellipsometry. The rigorous coupled-wave analysis is used to calculate the optical response of the gratings. Three parameters of the rectangular profile are determined by utilizing the least-square method. Detailed investigation of the spectral dependences demonstrates the uniqueness of the solution. Observing the spectral dependences of Wood anomalies suggests that even complicated profiles can be fitted with high authenticity.
  • Deep lamellar diffraction gratings fabricated by etching a transparent quartz plate are studied using spectroscopic ellipsometry. The rigorous coupled-wave analysis is used to calculate the optical response of the gratings. Three parameters of the rectangular profile are determined by utilizing the least-square method. Detailed investigation of the spectral dependences demonstrates the uniqueness of the solution. Observing the spectral dependences of Wood anomalies suggests that even complicated profiles can be fitted with high authenticity. (en)
Title
  • Spectroscopic ellipsometry on lamellar gratings
  • Spectroscopic ellipsometry on lamellar gratings (en)
skos:prefLabel
  • Spectroscopic ellipsometry on lamellar gratings
  • Spectroscopic ellipsometry on lamellar gratings (en)
skos:notation
  • RIV/00216224:14310/05:00013300!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/03/0776), P(ME 574)
http://linked.open...iv/cisloPeriodika
  • 1-4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 543907
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00013300
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • optical metrology; scatterometry; spectroscopic ellipsometry; diffraction grating; wood anomaly; RCWA (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [FBF0B16A07F5]
http://linked.open...i/riv/nazevZdroje
  • Applied Surface Science
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 244
http://linked.open...iv/tvurceVysledku
  • Antoš, Roman
  • Ohlídal, Ivan
  • Višňovský, Štefan
  • Pištora, J.
  • Mistrík, Jan
  • Murakami, K.
  • Horie, M.
  • Yamaguchi, Tomuo
issn
  • 0169-4332
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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