About: Optical measurement of mechanical stresses in diamond-like carbon films

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Description	In this paper the mechanical stresses taking place in diamond like thin films prepared by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are studied. For determination of the stress values the Stoney's formula is used. The values of the film thicknesses are determined using the combined method of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The values of the curvature radii of the deformed silicon substrates in consequence of the film stresses are evaluated using interferometric method based on two-beam interferometry and chromatic aberration method. The dependence of the mechanical stress inside these films on their thickness values is determined. It is found that this dependence can be approximate by the straight-line. The results achieved for the mechanical stresses obtained by both the optical methods, i.e. by the interferometric and chromatic aberration method, are compared. In this paper the mechanical stresses taking place in diamond like thin films prepared by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are studied. For determination of the stress values the Stoney's formula is used. The values of the film thicknesses are determined using the combined method of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The values of the curvature radii of the deformed silicon substrates in consequence of the film stresses are evaluated using interferometric method based on two-beam interferometry and chromatic aberration method. The dependence of the mechanical stress inside these films on their thickness values is determined. It is found that this dependence can be approximate by the straight-line. The results achieved for the mechanical stresses obtained by both the optical methods, i.e. by the interferometric and chromatic aberration method, are compared. (en)
Title	Optical measurement of mechanical stresses in diamond-like carbon films Optical measurement of mechanical stresses in diamond-like carbon films (en)
skos:prefLabel	Optical measurement of mechanical stresses in diamond-like carbon films Optical measurement of mechanical stresses in diamond-like carbon films (en)
skos:notation	RIV/00216224:14310/05:00013025!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA101/04/2131), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr Buršíková, Vilma Franta, Daniel Ohlídal, Miloslav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	534709
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00013025
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	DLC films; mechanical stress; two-beam interferometry; chromatic aberration method (en)
http://linked.open.../riv/klicoveSlovo	mechanical stress two-beam interferometry chromatic aberration method DLC films
http://linked.open...ontrolniKodProRIV	[9C9B87619717]
http://linked.open...v/mistoKonaniAkce	February 14-18, 2005, Merida, Yucatan, Mexico
http://linked.open...i/riv/mistoVydani	Bellingham, Washington, USA
http://linked.open...i/riv/nazevZdroje	8-th International Symposium on Laser Metrology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Realization of thelaboratory digital spectrophotometer for the wide spectral region
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Klapetek, Petr Ohlídal, Ivan Ohlídal, Miloslav Čudek, Vladimír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2005-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
number of pages	12 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE - The International Society for Optical Engineering
https://schema.org/isbn	0-8194-5757-4
http://localhost/t...ganizacniJednotka	14310

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