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Description
  • A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few ľs, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few ľs which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported.
  • A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few ľs, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few ľs which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported. (en)
Title
  • Reduction of transient regime in fast preionized high power pulsed magnetron discharge
  • Reduction of transient regime in fast preionized high power pulsed magnetron discharge (en)
skos:prefLabel
  • Reduction of transient regime in fast preionized high power pulsed magnetron discharge
  • Reduction of transient regime in fast preionized high power pulsed magnetron discharge (en)
skos:notation
  • RIV/00216224:14310/05:00012968!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 540405
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00012968
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; sputtering; preionization (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • FR - Francouzská republika
http://linked.open...ontrolniKodProRIV
  • [D5F7612FB381]
http://linked.open...i/riv/nazevZdroje
  • Europhysics Letters
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 72
http://linked.open...iv/tvurceVysledku
  • Vašina, Petr
  • Meško, Marcel
  • Boisse-Laporte, Caroline
  • Bretagne, Jean
  • Touzeau, Michel
  • de Poucques, Ludovic
  • Ganciu, Mihai
http://linked.open...n/vavai/riv/zamer
issn
  • 0295-5075
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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