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Description
  • To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of the sputtered vapour, we developed a new ionised physical vapour deposition (IPVD) method based on preionised Pulsed magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. Efficient vapour ionisation is obtained and due to the current pulse shortness, electric arc development is avoided.
  • To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of the sputtered vapour, we developed a new ionised physical vapour deposition (IPVD) method based on preionised Pulsed magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. Efficient vapour ionisation is obtained and due to the current pulse shortness, electric arc development is avoided. (en)
Title
  • Preionised pulsed magnetron discharges for ionised physical vapour deposition
  • Preionised pulsed magnetron discharges for ionised physical vapour deposition (en)
skos:prefLabel
  • Preionised pulsed magnetron discharges for ionised physical vapour deposition
  • Preionised pulsed magnetron discharges for ionised physical vapour deposition (en)
skos:notation
  • RIV/00216224:14310/05:00012906!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • 5
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 538097
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00012906
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; preionization; transport processes (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • RO - Rumunsko
http://linked.open...ontrolniKodProRIV
  • [E76B88A1BD56]
http://linked.open...i/riv/nazevZdroje
  • Journal of Optoelectronics and Advanced Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 7
http://linked.open...iv/tvurceVysledku
  • Vašina, Petr
  • Meško, Marcel
  • Bretagne, Jean
  • Touzeau, Michel
  • de Poucques, Ludovic
  • Imbert, Jean-Christophe
  • Dauchot, Jean-Pierre
  • Ganciu, Mihai
  • Hecq, Michel
  • Konstantinidis, Stephanos
  • Paint, Yoann
http://linked.open...n/vavai/riv/zamer
issn
  • 1454-4164
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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