About: Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented. The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented. (en)
Title	Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge (en)
skos:prefLabel	Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge (en)
skos:notation	RIV/00216224:14310/05:00012360!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/03/H162), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Janča, Jan Zajíčková, Lenka Dvořák, Pavel Jánský, Jaroslav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	520279
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00012360
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	IEDF hydrogen capacitive plasma low-pressure (en)
http://linked.open.../riv/klicoveSlovo	IEDF hydrogen capacitive plasma low-pressure
http://linked.open...ontrolniKodProRIV	[96599E9CC6AD]
http://linked.open...v/mistoKonaniAkce	Podbanské
http://linked.open...i/riv/mistoVydani	Podbanské
http://linked.open...i/riv/nazevZdroje	SAPP XV - Book of contributed papers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced topics in physics and chemistry of plasmas
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Dvořák, Pavel Janča, Jan Jánský, Jaroslav Zajíčková, Lenka
http://linked.open...vavai/riv/typAkce	CST - Celostátní
http://linked.open.../riv/zahajeniAkce	2005-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Univerzita Komenského v Bratislave. Vydavateľstvo
https://schema.org/isbn	80-223-2018-8
http://localhost/t...ganizacniJednotka	14310

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