About: Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma     Goto   Sponge   NotDistinct   Permalink

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Description
  • The objective of this work is to compare two IPVD processes developed in our laboratory, in particular the ionization efficiency of each system
  • The objective of this work is to compare two IPVD processes developed in our laboratory, in particular the ionization efficiency of each system (en)
  • Cilem teto prace je srovnat dva IPVD procesu, zejmena ionizacni potencial kazdeho z nich (cs)
Title
  • Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma
  • Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma (en)
  • Srovnani ionizacni ucinnosti dvou IPVD procesu: magnetronoveho vyboje s dodatecnym mikrovlnnym nebo RF vybojem (cs)
skos:prefLabel
  • Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma
  • Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma (en)
  • Srovnani ionizacni ucinnosti dvou IPVD procesu: magnetronoveho vyboje s dodatecnym mikrovlnnym nebo RF vybojem (cs)
skos:notation
  • RIV/00216224:14310/04:00024540!RIV09-GA0-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 558318
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/04:00024540
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • IPVD; microwave; RF; magnetron (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [5220DAF9E6A2]
http://linked.open...v/mistoKonaniAkce
  • Garmisch-Partenkirchen, Germany
http://linked.open...i/riv/mistoVydani
  • Garmisch-Partenkirchen, Germany
http://linked.open...i/riv/nazevZdroje
  • Prosseding of Ninth International Conference on Plasma Surface Engineering
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vašina, Petr
  • Boisse-Laporte, Caroline
  • Touzeau, Michel
  • Imbert, Jean-Christiphe
  • Teule-Gay, Lionel
  • de Pousques, Ludovic
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Prosseding of Ninth International Conference on Plasma Surface Engineering
http://localhost/t...ganizacniJednotka
  • 14310
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