About: Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The atmospheric pressure glow discharge burning in nitrogen with small admixture of organosilicon compounds such as hexamethyldisilazane or hexamethyldisiloxane was used for the deposition of thin organosilicon polymer films. The properties of the discharge were studied by means of optical emission spectroscopy and electrical measurements. The deposited films were characterized by atomic force microscopy, x-ray photoelectron spectroscopy, infrared transmission measurements, ellipsometry, depth sensing indentation technique and contact angle measurements. The films were polymer-like, transparent in the visible range, with uniform thickness and without pinholes. The film hardness varied from 0.3 to 0.6 GPa depending on deposition conditions, the elastic modulus was in the range 15-28 GPa and the surface free energy was in the range 26-45 mJ m-2. The studied films exhibited good adhesion to the substrate. The atmospheric pressure glow discharge burning in nitrogen with small admixture of organosilicon compounds such as hexamethyldisilazane or hexamethyldisiloxane was used for the deposition of thin organosilicon polymer films. The properties of the discharge were studied by means of optical emission spectroscopy and electrical measurements. The deposited films were characterized by atomic force microscopy, x-ray photoelectron spectroscopy, infrared transmission measurements, ellipsometry, depth sensing indentation technique and contact angle measurements. The films were polymer-like, transparent in the visible range, with uniform thickness and without pinholes. The film hardness varied from 0.3 to 0.6 GPa depending on deposition conditions, the elastic modulus was in the range 15-28 GPa and the surface free energy was in the range 26-45 mJ m-2. The studied films exhibited good adhesion to the substrate. (en) Doutnavý výboj za atmosférického tlaku (APGD) hořící v dusíku s malou příměsí organosilikonových sloučenin jako hexametyldisilazan nebo hexametydisiloxan byl použit pro depozici tenkých polymerních vrstev. (cs)
Title	Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge (en) Depozice tenkých organosilikonových polymerních vrstev v doutnavém výboji za atmosférického tlaku (cs)
skos:prefLabel	Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge (en) Depozice tenkých organosilikonových polymerních vrstev v doutnavém výboji za atmosférického tlaku (cs)
skos:notation	RIV/00216224:14310/04:00019785!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	2112-2120
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/02/0880), P(GP202/02/D097), P(OC 527.20), Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	15
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Sťahel, Pavel Čech, Jan Navrátil, Zdeněk Zajíčková, Lenka Buršíková, Vilma Trunec, David
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	559753
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/04:00019785
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	atmospheric presure glow discharge; nitrogen; deposition; organosilicon (en)
http://linked.open.../riv/klicoveSlovo	atmospheric presure glow discharge deposition nitrogen organosilicon
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[C519DFEEFEE8]
http://linked.open...i/riv/nazevZdroje	Journal of physics D: Applied physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure Application of surface discharge at atmospheric pressure for the modification of the surfaces and deposition of polymer protective coatings http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.20
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	37
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Zajíčková, Lenka Čech, Jan Navrátil, Zdeněk Sťahel, Pavel Trunec, David
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0022-3727
number of pages	9 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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