About: Deposition of polymer films by rf discharge at atmospheric pressure

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Depozice polymerních vrstev v rf výboji za atmosférického tlaku (cs) RF plasma nozzle at atmospheric pressure has been used for deposition of thin films. The mechanical properties of deposited films were studied using indentation technique. Special properties of RF discharges offer hopeful technological applications like deposition of thin solid films. The parameters of the plasma were investigated by spectral and optical methods. The powered RF electrode of the torch discharge plasma source is made from the metal or dielectric pipe with an inner diameter of 1 - 2 mm and with a length of several centimeters. The electrode is connected through the matching unit to the RF generator driven at the frequency of 13.56 MHz. The mixture of argon and n-hexane or HMDSO (hexamethyldisiloxane, C6H18Si2O) gas ows through the RF electrode at the pipe. Polymer films were deposited on the several substrates e.g. glass, brass polished plates and Si wafers. RF plasma nozzle at atmospheric pressure has been used for deposition of thin films. The mechanical properties of deposited films were studied using indentation technique. Special properties of RF discharges offer hopeful technological applications like deposition of thin solid films. The parameters of the plasma were investigated by spectral and optical methods. The powered RF electrode of the torch discharge plasma source is made from the metal or dielectric pipe with an inner diameter of 1 - 2 mm and with a length of several centimeters. The electrode is connected through the matching unit to the RF generator driven at the frequency of 13.56 MHz. The mixture of argon and n-hexane or HMDSO (hexamethyldisiloxane, C6H18Si2O) gas ows through the RF electrode at the pipe. Polymer films were deposited on the several substrates e.g. glass, brass polished plates and Si wafers. (en)
Title	Depozice polymerních vrstev v rf výboji za atmosférického tlaku (cs) Deposition of polymer films by rf discharge at atmospheric pressure Deposition of polymer films by rf discharge at atmospheric pressure (en)
skos:prefLabel	Depozice polymerních vrstev v rf výboji za atmosférického tlaku (cs) Deposition of polymer films by rf discharge at atmospheric pressure Deposition of polymer films by rf discharge at atmospheric pressure (en)
skos:notation	RIV/00216224:14310/04:00019762!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	C586-C591
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/03/0011), P(OC 527.20), Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	54
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Slavíček, Pavel Klíma, Miloš Brablec, Antonín Buršíková, Vilma Kapička, Vratislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	559749
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/04:00019762
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	deposition of films; rf discharge; plasma diagnostics (en)
http://linked.open.../riv/klicoveSlovo	deposition of films plasma diagnostics rf discharge
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[4B86F68B3B81]
http://linked.open...i/riv/nazevZdroje	Czech. J. Phys.
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Barrier microdischarges and their degradation effects http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.20
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	2004
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Klíma, Miloš Slavíček, Pavel Brablec, Antonín Kapička, Vratislav
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0011-4626
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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