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| Description
| - In this paper the quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane CH4 and hexamethyldisiloxane C6H18Si2O in the deposition mixture is determined. For this purpose the modified Stoney's formula is employed. The important quantities taking place in this formula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate because of the film stress and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. A discussion of this fact is also performed. The film studied w
- In this paper the quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane CH4 and hexamethyldisiloxane C6H18Si2O in the deposition mixture is determined. For this purpose the modified Stoney's formula is employed. The important quantities taking place in this formula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate because of the film stress and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. A discussion of this fact is also performed. The film studied w (en)
- V tomto článku je určena kvantitativní závislost mechanických napětí uvnitř diamantu podobných uhlíkových vrstev obsahujících Si a O na poměru průtoků metanu a hexamethyldisiloxanu v deposiční směsi. Pro tento účel je využita modifikovaná Stoneyova formule. Významné veličiny vyskytující se v této formuli, tj. poloměr křivosti sférického povrchu křemíkové podložky deformované kvůli napětí ve vrstvě a tloušťka vrstvy, jsou určeny pomocí dvoupaprskové interference, víceúhlové spektroskopické elipsometrie a spektroskopické reflektometrie aplikované při kolmém dopadu světla. Je ukázáno, že vliv poměru průtoků na hodnoty mechanického napětí uvnitř vrstev je zanedbatelný v rámci experimentální přesnosti dosažené při určení tohoto napětí, pokud celkový tok plynů v deposiční směsi je konstantní. Diskuse této skutečnosti je také provedena. Studované vrstvy byly připraveny pomocí plasmově podporované chemické deposice. (cs)
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| Title
| - Mechanická napětí v diamantu podobných uhlíkových vrstvách obsahující Si a O studovaná pomocí optických metod (cs)
- Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O
- Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O (en)
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| skos:prefLabel
| - Mechanická napětí v diamantu podobných uhlíkových vrstvách obsahující Si a O studovaná pomocí optických metod (cs)
- Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O
- Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O (en)
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| skos:notation
| - RIV/00216224:14310/04:00010888!RIV08-MSM-14310___
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| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
| - P(GA101/04/2131), Z(MSM 143100003)
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/04:00010888
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - DLC films; mechanical stress; two-beam interferometry (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...v/mistoKonaniAkce
| - August 4-5, 2004, Denver, Colorado, USA
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| http://linked.open...i/riv/mistoVydani
| - Bellingham, Washington, USA
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| http://linked.open...i/riv/nazevZdroje
| - SPIE's 49th Annual Meeting
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
| - Buršíková, Vilma
- Franta, Daniel
- Ohlídal, Ivan
- Ohlídal, Miloslav
- Čudek, Vladimír
- Šiler, Martin
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| http://linked.open...vavai/riv/typAkce
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| http://linked.open.../riv/zahajeniAkce
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| http://linked.open...n/vavai/riv/zamer
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| number of pages
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| http://purl.org/ne...btex#hasPublisher
| - SPIE - The International Society for Optical Engineering
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| https://schema.org/isbn
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| http://localhost/t...ganizacniJednotka
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