About: Spatial Distribution of Species in an IPVD reactor

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too. Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too. (en) Výsledky optické emisní a absorpční spektroskopie z reaktoru obsahujícího magnetron a dvě mikrovlnné antény jsou diskutovány společně s výsledky vrstev z rastrovacího elektronového mikroskopu. (cs)
Title	Prostorově rozložení částic v IPVD reactorem (cs) Spatial Distribution of Species in an IPVD reactor Spatial Distribution of Species in an IPVD reactor (en)
skos:prefLabel	Prostorově rozložení částic v IPVD reactorem (cs) Spatial Distribution of Species in an IPVD reactor Spatial Distribution of Species in an IPVD reactor (en)
skos:notation	RIV/00216224:14310/03:00025490!RIV09-MSM-14310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Bublan, Martin Vašina, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	628028
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/03:00025490
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron (en)
http://linked.open.../riv/klicoveSlovo	magnetron optical emission spectroscopy IPVD optical absorption spectroscopy
http://linked.open...ontrolniKodProRIV	[3C64EDC58CEC]
http://linked.open...v/mistoKonaniAkce	Charles University in Prague, Faculty of Matema
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	WDS 03 Proceeding of Contributed Papers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Vašina, Petr Boisse-Laporte, Caroline Touzeau, Michel de Poucques, Ludovic Bublan, Martin Imbert, Jean-Christophe
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-06-10 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze
https://schema.org/isbn	80-86732-18-5
http://localhost/t...ganizacniJednotka	14310

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