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| Description
| - Hard diamond like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled rf discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx films were close to DLC films as concerning the optical properties in the uv/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposition rate increased.
- Hard diamond like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled rf discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx films were close to DLC films as concerning the optical properties in the uv/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposition rate increased. (en)
- Tvrdé diamantu podobné uhlíkové vrstvy (DLC) s příměsí SiOx bylu připraveny v kapacitně vázaném vf výboji ze směsi metanu a hexametyldisiloxanu (HMDSO). Byl měněn průtok HMDSO, což ovlivňovalo množství SiOx ve vrstvách. Metodou Rutherfordovského zpětného rozptylu kombinovanou s metodou ERDA bylo stanoveno kompletní atomární složení vrstev. Tloušťka a optické vlastnosti byly stanoveny z elipsometrických měření. Mechanické vlastnosti byly studovány hloubkově citlivou indentační technikou za pomocí přístroje Fischerscope H100. Poměr O/Si v DLC:SiOx vrstvách byl 0,286 a obsah SiOx se zvyšoval s rostoucím poměrem průtoku HMDSO k metanu (q). Vrstvy DLC:SiOx byly z hlediska optických vlastností v uv a viditelné oblasti podobné vrstvám DLC a vykazovaly podobně vysokou tvrdost jako DLC vrstvy pokud byl poměr q maximálně 0,25. Podařilo se ovšem zredukovat vysoké tlakové pnutí ve vrstvách, byla podstatně vylepšena lomová houževnatost a zvýšila se depoziční rychlost. (cs)
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| Title
| - Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD
- Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD (en)
- Vztah mezi obsahem SiOx a vlastnostmi vrstev DLC:SiOx připravenými PECVD (cs)
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| skos:prefLabel
| - Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD
- Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD (en)
- Vztah mezi obsahem SiOx a vlastnostmi vrstev DLC:SiOx připravenými PECVD (cs)
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| skos:notation
| - RIV/00216224:14310/03:00021418!RIV08-MSM-14310___
|
| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
| - P(KSK1010104), Z(MSM 143100003)
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| http://linked.open...iv/cisloPeriodika
| |
| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/03:00021418
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
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| http://linked.open.../riv/klicoveSlovo
| |
| http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/nazevZdroje
| - Surface and Coating Technology
|
| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
| |
| http://linked.open...vavai/riv/projekt
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...v/svazekPeriodika
| |
| http://linked.open...iv/tvurceVysledku
| - Buršíková, Vilma
- Janča, Jan
- Macková, Anna
- Zajíčková, Lenka
- Peřina, Vratislav
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| http://linked.open...n/vavai/riv/zamer
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| issn
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| number of pages
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| http://localhost/t...ganizacniJednotka
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