About: Optical characterization of ZnSe thin films

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Description	In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses. In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses. (en) In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses. (cs)
Title	Optical characterization of ZnSe thin films Optical characterization of ZnSe thin films (en) Optical characterization of ZnSe thin films (cs)
skos:prefLabel	Optical characterization of ZnSe thin films Optical characterization of ZnSe thin films (en) Optical characterization of ZnSe thin films (cs)
skos:notation	RIV/00216224:14310/03:00009333!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	831-832
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr Franta, Daniel
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	619659
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/03:00009333
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ZnSe; Optical constants; Ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	Optical constants Ellipsometry ZnSe
http://linked.open...ontrolniKodProRIV	[C5DE4318DFD3]
http://linked.open...v/mistoKonaniAkce	August 25-30, 2002, Florence, Italy
http://linked.open...i/riv/mistoVydani	Bellingham, Washington, USA
http://linked.open...i/riv/nazevZdroje	19th Congress of the International Commission for Optics: Optics for the Quality of Life
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Franta, Daniel Klapetek, Petr Ohlídal, Ivan Sitter, Helmut Bonanni, Alberta Montaigne-Ramil, Alberto Stifter, David
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE - The International Society for Optical Engineering
https://schema.org/isbn	0-8194-4596-7
http://localhost/t...ganizacniJednotka	14310

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