About: Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

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About: Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters. In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters. (en) In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters. (cs)
Title	Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (en) Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (cs)
skos:prefLabel	Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (en) Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry (cs)
skos:notation	RIV/00216224:14310/03:00008532!RIV08-GA0-14310___
http://linked.open.../vavai/riv/strany	260-271
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA101/01/1104), P(GA202/01/1110)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr Ohlídal, Miloslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	600964
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/03:00008532
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	fims nonuniform in optical parameters; optical characterization (en)
http://linked.open.../riv/klicoveSlovo	optical characterization fims nonuniform in optical parameters
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[A453ECA7400C]
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	5182
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Ohlídal, Ivan Ohlídal, Miloslav Čudek, Vladimír Jákl, Miloš
issn	0277-786X
number of pages	11 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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