About: Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method

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About: Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper an atomic force microscopy analysis of the microrough upper boundaries of ZrO2 and HfO2 thin films is presented. Within this analysis the values of the width, root-mean-square value of heights and power spectral density function of these boundaries are determined for ZrO2 and HfO2 exhibiting different thicknesses. The thickness dependences of the quantities mentioned are introduced. The values of the thicknesses of the films are evaluated using the combined optical method. This optical method is also used to describe boundary microroughness within the effective medium theory. A discussion of the results concerning the microroughness of the upper boundaries of both the ZrO2 and HfO2 thin films is also introduced. In this paper an atomic force microscopy analysis of the microrough upper boundaries of ZrO2 and HfO2 thin films is presented. Within this analysis the values of the width, root-mean-square value of heights and power spectral density function of these boundaries are determined for ZrO2 and HfO2 exhibiting different thicknesses. The thickness dependences of the quantities mentioned are introduced. The values of the thicknesses of the films are evaluated using the combined optical method. This optical method is also used to describe boundary microroughness within the effective medium theory. A discussion of the results concerning the microroughness of the upper boundaries of both the ZrO2 and HfO2 thin films is also introduced. (en) In this paper an atomic force microscopy analysis of the microrough upper boundaries of ZrO2 and HfO2 thin films is presented. Within this analysis the values of the width, root-mean-square value of heights and power spectral density function of these boundaries are determined for ZrO2 and HfO2 exhibiting different thicknesses. The thickness dependences of the quantities mentioned are introduced. The values of the thicknesses of the films are evaluated using the combined optical method. This optical method is also used to describe boundary microroughness within the effective medium theory. A discussion of the results concerning the microroughness of the upper boundaries of both the ZrO2 and HfO2 thin films is also introduced. (cs)
Title	Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method (en) Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method (cs)
skos:prefLabel	Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method (en) Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method (cs)
skos:notation	RIV/00216224:14310/02:00006294!RIV08-GA0-14310___
http://linked.open.../vavai/riv/strany	559
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA101/01/1104), P(GA202/01/1110)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr Franta, Daniel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	638114
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/02:00006294
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ZrO2 and Hfo2 films; AFM; optical methods; rough upper boundaries (en)
http://linked.open.../riv/klicoveSlovo	optical methods AFM ZrO2 and Hfo2 films rough upper boundaries
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[D1FE492E2B81]
http://linked.open...i/riv/nazevZdroje	Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	34
http://linked.open...iv/tvurceVysledku	Franta, Daniel Klapetek, Petr Ohlídal, Ivan Pokorný, Pavel
issn	0142-2421
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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