About: Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD     Goto   Sponge   NotDistinct   Permalink

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Description
  • Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied.
  • Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. (en)
  • Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. (cs)
Title
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD (en)
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD (cs)
skos:prefLabel
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD (en)
  • Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD (cs)
skos:notation
  • RIV/00216224:14310/01:00004507!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany
  • 144
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/00/P037), P(ME 301), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 690203
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/01:00004507
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Diamond-like carbon; PECVD; Ellipsometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [D9EEC0F9334A]
http://linked.open...v/mistoKonaniAkce
  • 19. - 20. 9. 2001, FSI VUT v Brně
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • JUNIORMAT 01
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Brzobohatý, Oto
  • Zajíčková, Lenka
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Vysoké učení technické v Brně. Fakulta strojního inženýrství. Ústav materiálových věd a inženýrství; Česká společnost pro nové materiály a technologie
https://schema.org/isbn
  • 80-214-1885-0
http://localhost/t...ganizacniJednotka
  • 14310
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